Work

Crystallographic Texture and Phase Metrology During Damascene Copper Processing

Year: 2002

Type: article

Source: MRS Proceedings

DOI: 10.1557/proc-721-j1.1

Authors: K.J. Kozaczek, P.W. DeHaven, K.P. Rodbell, S. Malhotra, D.S. Kurtz, R.I. Martin, P.R. Moran

Institutions: IBM (United States), IBM Research - Thomas J. Watson Research Center

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2467283652

FWCI: 0.654

Cites: 9

Cited by: 4

Related to: 10