Work

Improvement of electrical properties for high-κ dielectrics grown by MOCVD via cyclic remote plasma oxidation

Year: 2002

Type: conference-paper

Source: International Conference on Solid State Devices and Materials (SSDM)

DOI: 10.7567/ssdm.2002.b-3-3

Authors: Sadayoshi Horii, Masayuki Asai, Hironobu Miya Kazuhiko Yamamoto, Masaaki Niwa

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2467572017

FWCI: 0.356

Cites:

Cited by: 2

Related to: 10