Work

Advanced Low Temperature Raised S/D Epitaxy Using Cyclic and Poly-Selective Techniques

Year: 2009

Type: conference-paper

Source: International Conference on Solid State Devices and Materials (SSDM)

DOI: 10.7567/ssdm.2009.b-6-1

Authors: N. Loubet, P. Khare, Q. Liu, M. Takayanagi, R. Sampson

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2467882939

FWCI:

Cites:

Cited by: 1

Related to: 10