Work

Reduction of the premetal dielectric thermal budget for a 0.35mm technology

Year: 1996

Type: article

Authors: J. Waeterloos, H. Meynen, Muriel de Potter de ten Broeck, B. Coenegrachts, Teng Gao, Joost Grillaert, Luc Van den hove, Karen Maex

Language: English

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2523948962

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Related to: 10