Work

Analytical and functional characterization of recycled fumed silica slurries in ILD CMP

Year: 2003

Type: article

Authors: Patrick Levy, S. Rader, Paul G. LeFevre, K. Ina, Farhang Shadman, Masano Sugiyama, Ara Philipossian

Institutions: Fujimi Incorporated (Japan), University of Arizona

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Responsible consumption and production

Open Access status: closed

OpenAlex ID: W2612901983

FWCI:

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