Work

Focused ion beam micromachining of Si and GaAs using Ga and Au liquid metal ion sources

Year: 1990

Type: article

DOI: 10.6083/m4p8492x

Author: Crow, Geoffrey A.

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W2620416618

FWCI:

Cites:

Cited by: 4

Related to: 10