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CVD/ALDを用いたCu(Mn)/Co(W)配線システムの構築と3次元アトムプローブによるサブナノ構造・バリヤ性評価

Year: 2015

Type: article

Source: IEICE Technical Report; IEICE Tech. Rep.

Authors: 紘平嶋, ユアンツ, 秀治清水, 康雄清水, 健百瀬, 耕治井上, 康介永井, 幸浩霜垣

Language: Japanese

Topic: Copper Interconnects and Reliability

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W266793984

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