Work

WS2 transistors on 300 mm wafers with BEOL compatibility

Year: 2017

Type: conference-paper

Source: European Solid-State Device Research Conference

DOI: 10.1109/essderc.2017.8066629

Authors: T. Schram, Q. Smets, B. Groven, M. H. Heyne, E. Kunnen, A. Thiam, K. Devriendt, A. Delabie, D. Lin, M. Lux, D. Chiappe, I. Asselberghs, S. Brus, C. Huyghebaert, S. Sayan, A. Juncker, M. Caymax, I. P. Radu

Institution: IMEC

Language: English

Topic: 2D Materials and Applications

Subfield: Materials Chemistry

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2761702500

FWCI: 15.04

Cites: 10

Cited by: 43

Related to: 10