Work

Characterization of periodic extreme ultraviolet multilayer based on multi-objective evolutionary algorithm

Year: 2017

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.4995806

Authors: Shang-qi Kuang, Xue-peng Gong, Hai-gui Yang

Institutions: Changchun University of Science and Technology, Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, State Key Laboratory of Applied Optics

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G4633722668

OpenAlex ID: W2767539182

FWCI: 0.137

Cites: 22

Cited by: 2

Related to: 10