Work

Optical design of ZEISS ForTune photo mask tuning system: how to generate diffraction-limited laser foci in thick specimens

Year: 2018

Type: conference-paper

Source: SPIE Optical Design and Engineering

DOI: 10.1117/12.2317723

Authors: Markus Seesselberg, Joachim Welte, Vladimir Dmitriev, Uri Stern

Institutions: Carl Zeiss (Germany), Carl Zeiss (Israel)

Language: English

Topic: Advanced optical system design

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2806202458

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Cites: 17

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Related to: 10