Work

Characterization of Self-Contamination from PVA Roll Brush with Atomic Force Microscopy and Fluorescent Microscopy

Year: 2018

Type: conference-paper

Source: IEEE International Symposium on Semiconductor Manufacturing conference proceedings

DOI: 10.1109/issm.2018.8651166

Authors: Shohei Shima, Satomi Hamada, Chikako Takatoh, Yutaka Wada, Akira Fukunaga, Hiroshi Sobukawa

Institution: Ebara (Japan)

Language: English

Topic: Force Microscopy Techniques and Applications

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2920525501

FWCI:

Cites: 1

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Related to: 10