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Akira Fukunaga

Observed name: Akira FUKUNAGA
Institution: Ebara (Japan)
OpenAlex ID: A5111566332
Visualizing Nanoscale Distribution of Corrosion Cells by Open-Loop Electric Potential Microscopy
2016 · Kyoko Honbo, Shoichiro Ogata, et al. · ACS Nano · 44
Visualizing charges accumulated in an electric double layer by three-dimensional open-loop electric potential microscopy
2018 · Kaito Hirata, Takuya Kitagawa, et al. · Nanoscale · 23
Nanoscale corrosion behavior of polycrystalline copper fine wires in dilute NaCl solution investigated by in-situ atomic force microscopy
2016 · Shoichiro Ogata, Naritaka Kobayashi, et al. · Corrosion Science · 22
Frictional Analysis of PVA Brush for Post CMP Cleaning: Effects of Rotation Speed, Compression Distance, and Fluid Viscosity
2012 · Takashi Fujiwara, Toshiyuki Sanada, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 17
Stress Corrosion Cracking of Cu Interconnects during CMP with a Cu/Porous Low-k Structure
2005 · Masako Kodera, Shin-ichiro Uekusa, et al. · Journal of The Electrochemical Society · 17
Electroplating copper filling for 3D packaging
2009 · Mizuki Nagai, Yusuke Tamari, et al. · IEEE Electronic Components and Technology Conference (ECTC) · 12
Localized Oxidation of the Cu Surface after Chemical Mechanical Planarization Processing
2005 · Masako Kodera, Yukiko Nishioka, et al. · Japanese Journal of Applied Physics · 12
Influence of Wafer Edge Geometry on Removal Rate Profile in Chemical Mechanical Polishing: Wafer Edge Roll-Off and Notch
2012 · Akira Fukuda, Tetsuo Fukuda, et al. · Japanese Journal of Applied Physics · 9
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Nodule Deformation on Cleaning of PVA Roller Brushes and its Relation to Cross-contamination
2021 · Atsuki Hosaka, Tsubasa Miyaki, et al. · Journal of Photopolymer Science and Technology · 8
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Measurement Method for Adhesion Forces between Polyvinyl Acetal Brushes and Flat Surfaces
2019 · Keishi Yamada, Yuki Mizushima, et al. · ECS Journal of Solid State Science and Technology · 8
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Static and dynamic interaction between polyvinyl acetal brushes and flat surfaces—Measuring near-surface brush volume ratio and nodule volume change for moving brushes
2022 · Atsuki Hosaka, Yuki Mizushima, et al. · Microelectronic Engineering · 7
Nodule Deformation of PVA Roller Brushes on a Rotating Plate: Optimum Cleaning for Nanosized Particles due to Liquid Absorption and Desorption of Sponge Deformation
2021 · Tsubasa Miyaki, Yuki Mizushima, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 7
An Observation Method of Real Contact Area during PVA Brush Scrubbing
2018 · Toshiyuki Sanada, Masanao Hanai, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 7
Measurement of the Frictional Force between PVA Roller Brushes and Semiconductor Wafers with Various Films Immersed in Chemicals
2016 · Kenya Nishio, Toshiyuki Sanada, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 7
Stress Analyses during Chemical Mechanical Planarization Processing with Cu/Porous Low-k Structures of LSI Devices
2005 · Masako Kodera, Akira Fukuda, et al. · Japanese Journal of Applied Physics · 6
Nodule contact path of polyvinyl acetal roller brushes on a rotating plate and its relation to cross contamination
2022 · Shota Suzuki, Yuki Mizushima, et al. · Microelectronic Engineering · 5
Electrochemical Reactions During Ru Chemical Mechanical Planarization and Safety Considerations
2011 · Shohei Shima, Yutaka Wada, et al. · Japanese Journal of Applied Physics · 5
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Skin Layer Effects on Adhesion Forces of PVA Brushes and Its Temperature Dependence
2019 · Keishi Yamada, Toshiyuki Sanada, et al. · ECS Transactions · 4
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Development of post-CMP cleanup processing for Cu/low-k devices
2006 · Masako Kodera, Shin-Ichiro Uekusaka, et al. · Electronics and Communications in Japan (Part II Electronics) · 4
Metrologies of abrasive behaviors for understanding and upgrading CMP process
2016 · Shohei Shima, Satomi Hamada, et al. · IEEE International Symposium on Semiconductor Manufacturing conference proceedings · 3
Normal force and behavior of containing water during the compression of PVA brush
2015 · Kenya Nishio, Toshiyuki Sanada, et al. · 3
Effect of Surface Wettability on Frictional Conditions of PVA Roll Brushes
2013 · Yoshitaka Hara, Toshiyuki Sanada, et al. · ECS Transactions · 2
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Analysis on Copper Photocorrosion Induced by Illuminance in Chemical Mechanical Planarization Equipment Using Photodiode and Quartz Crystal Microbalance
2010 · Shohei Shima, Yutaka Wada, et al. · Japanese Journal of Applied Physics · 2
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Measurement of Lateral Removal Force for a Baked Polymer Particle on a Glass Plate
2018 · Toshiyuki Sanada, Emu Tokuda, et al. · Journal of Photopolymer Science and Technology · 1
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Developments for Physical Cleaning Sample with High Adhesion Force Particles and Direct Measurement of its Removal Force
2016 · Emu Tokuda, Toshiyuki Sanada, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1
Works count: 70
Citation count: 241
H-index: 8
I10-index: 7
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