Year: 2019
Type: article
Abstract: This article describes target material options for sputter coaters that deposit a thin metal coating on non-conductive SEM samples. Coating a sample with a conductive metal renders an insulating sample conductive enough to minimize charging effects on the SEM image. In most cases, coating SEM samples with only a few nanometers of a metal results in crisp, clear images. Proper target material selection is dictated by overall imaging requirements, the SEM available, the specimen material being evaluated, and whether X-ray microanalysis will be required.
Source: Microscopy Today
Authors: Rod Heu, Sina Shahbazmohamadi, John Yorston, Patrick Capeder
Institution: University of Connecticut
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: bronze
OpenAlex ID: W2962148024