Work

Nondestructive characterization of nanoscale subsurface features fabricated by selective etching of multilayered nanowire test structures using Mueller matrix spectroscopic ellipsometry based scatterometry

Year: 2020

Type: article

Source: Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena

DOI: 10.1116/1.5136291

Authors: Madhulika Korde, Subhadeep Kal, Cheryl Alix, Nick Keller, G. Andrew Antonelli, Aelan Mosden, Alain C. Diebold

Institutions: State University of New York, University at Albany, State University of New York, Center for Nanoscale Science and Technology, Onto Innovation (United States)

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Semiconductor Research Corporation

Award: G5226879344

OpenAlex ID: W3010419581

FWCI: 0.888

Cites: 22

Cited by: 23

Related to: 10