Work

Observations of Defect Generation at Stacking Faults in Boron Diffused and Oxidized Silicon Films

Year: 1973

Type: article

Source: Proceedings annual meeting Electron Microscopy Society of America

DOI: 10.1017/s0424820100071089

Authors: A. G. Cullis, D. M. Maher, C. M. Hsieh

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3036918656

FWCI: 0.626

Cites: 3

Cited by: 2

Related to: 10