3-D Self-aligned Stacked NMOS-on-PMOS Nanoribbon Transistors for Continued Moore’s Law Scaling
Year: 2020
Type: conference-paper
Authors: C. -Y. Huang, G. Dewey, E. Mannebach, A. Phan, P. Morrow, W. Rachmady, I. -C. Tung, N. Thomas, U. Alaan, R. Paul, N. Kabir, B. Krist, A. Oni, M. Mehta, M. Harper, P. Nguyen, R. Keech, S. Vishwanath, K. L. Cheong, J. S. Kang, A. Lilak, M. Metz, S. Clendenning, B. Turkot, R. Schenker, H. J. Yoo, M. Radosavljevic, J. Kavalieros
Institution: Intel (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W3136856580