Work

Radial spatiotemporal evolution of rf magnetic field and plasma current in a very-high-frequency plasma source over a wide range of plasma density and pressure

Year: 2021

Type: article

Source: Physical review. E

DOI: 10.1103/physreve.104.025207

Authors: Jianping Zhao, Peter L. G. Ventzek, Barton Lane, Toshihiko Iwao, Kiyotaka Ishibashi

Institutions: Tokyo Electron (Japan), Tokyo Electron Technology Solutions Limited (Japan)

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W3194077288

FWCI: 0.073

Cites: 30

Cited by: 1

Related to: 10