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K. Ishibashi

Measurements and modeling of the impact of radical recombination on silicon nitride growth in microwave plasma assisted atomic layer deposition
2017 · Toshihiko Iwao, Peter L. G. Ventzek, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 16
Plasma distribution in a planar-type surface wave-excited plasma source
2005 · H. Kousaka, K. Ono, et al. · Thin Solid Films · 16
Theoretical evaluation of thermal decomposition of dichlorosilane for plasma-enhanced atomic layer deposition of silicon nitride: the important role of surface hydrogen
2018 · Gregory Hartmann, Peter L. G. Ventzek, et al. · Physical Chemistry Chemical Physics · 15
Epitaxial Cu contacts on semiconducting diamond
1994 · P.K. Baumann, T.P. Humphreys, et al. · Diamond and Related Materials · 15
A microbeam line for medium-energy ion beams
1990 · M. Takai, T. Matsuo, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 13
Microbeamline design for medium to high energy helium ion beams
1989 · M. Takai, T. Matsuo, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 11
Damage induced during channeling measurements with a nuclear microprobe
1991 · K. Inoue, M. Takai, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 10
Evaluation of beam-induced ablation during microbeam irradiation
1991 · M. Takai, K. Hirai, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 9
Magnetic Analysis of Quadrupole Lens for MeV Ion Microprobe
1989 · Ken-ichi Inoue, Mikio Takai, et al. · Japanese Journal of Applied Physics · 9
Development of a compact nuclear microprobe system and its application to the analysis of titanium castings
1993 · K. Ishibashi, K. Inoue, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 8
Establishment of very uniform gas-flow pattern in the process chamber for microwave-excited high-density plasma by ceramic shower plate
2009 · Tetsuya Goto, Atsutoshi Inokuchi, et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 7
Compact nuclear microprobe system for RBS/PIXE
1991 · K. Inoue, K. Ishibashi, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 7
Thermal stability of thin poly-Si/Ta2O5/TiN capacitors for dynamic random access memory applications
1994 · K. Ishibashi, B. K. Patnaik, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 5
Influence of beam current fluctuation on secondary electron and RBS mapping images
1991 · M. Takai, Y. Agawa, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 5
Necking and seed growth of Bi2Sr2CaCu2Ox superconducting single crystals
1993 · I. Shigaki, K. Kitahama, et al. · Cryogenics · 2
Radial spatiotemporal evolution of rf magnetic field and plasma current in a very-high-frequency plasma source over a wide range of plasma density and pressure
2021 · Jianping Zhao, Peter L. G. Ventzek, et al. · Physical review. E · 1
Influence of Beam Current Ripple on Secondary Electron and RBS Mapping Images
1990 · Yoshiaki Agawa, Mikio Takai, et al. · Japanese Journal of Applied Physics · 1
Diagnostics of plasma neutral species in a very high frequency oxygen plasma with high sensitivity broadband absorption spectroscopy
2018 · Zhao, J., Ventzek, Peter L G, et al. · HAL
Reaction Mechanisms of Halogenated Silanes on N-Rich Surfaces during Atomic Layer Deposition of Silicon Nitride
2018 · Gregory Peter Hartmann, Peter Ventzek, et al. · ECS Meeting Abstracts
Fluid Modeling of a Very High Frequency Capacitively Coupled Reactor
2016 · Rochan Upadhyay, Laxminarayan Raja, et al. · Bulletin of the American Physical Society
(Invited) Plasma Process Simulation for Advanced Semiconductor Applications
2016 · Peter Ventzek, Alok Ranjan, et al. · ECS Meeting Abstracts
Reactive radical production and transport analysis in ammonia-hydrogen-argon microwave plasmas
2015 · Toshihiko Iwao, Peter L. G. Ventzek, et al. · Bulletin of the American Physical Society
Self-Consistent Simulations of the Radial Line Slot Antenna Plasma Source
2013 · Peter L. G. Ventzek, Rochan Upadhyay, et al. · Bulletin of the American Physical Society
Simulation of microwave pulsing in a radial line slot antenna etch process reactor
2013 · Rochan Upadhyay, K. Ishibashi, et al. · Bulletin of the American Physical Society
Nuclear reaction studied by $(\vec{p},\vec{p}\, ')$ reactions at 0°
2000 · A. Tamii, T. Ishikawa, et al. · Spins in Nuclear and Hadronic Reactions
Works count: 39
Citation count: 150
H-index: 9
I10-index: 7
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