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Stoichiometric disturbances in multi-atomic multilayered structures due to ion implantation through mask openings

Year: 1996

Type: book-chapter

Source: Elsevier eBooks

DOI: 10.1016/b978-0-444-82413-4.50078-0

Authors: M.M. Faye, A. Altibelli, C. Bonafos, A. Claverie

Institutions: Cheikh Anta Diop University, Centre National de la Recherche Scientifique, Centre d’Élaboration de Matériaux et d’Études Structurales

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4241674535

FWCI:

Cites: 7

Cited by:

Related to: 10