Work

Vertical travelling scatterometry for metrology on fully integrated devices

Year: 2022

Type: conference-paper

Source: Metrology, Inspection, and Process Control XXXVI

DOI: 10.1117/12.2614077

Authors: Daniel Schmidt, Manasa Medikonda, Michael Rizzolo, Claire Silvestre, Julien Frougier, Andrew Greene, Mary A. Breton, Aron Cepler, Jacob Ofek, Itzik Kaplan, Roy Koret, Igor Turovets

Institutions: IBM (United States), Nova Research Company (United States), Nova Measuring Instruments (Israel)

Language: English

Topic: Optical Polarization and Ellipsometry

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4281568010

FWCI: 4.923

Cites:

Cited by: 7

Related to: 10