Work

Low-ESL (<1 pH @ 8.5 GHz) Multi-Terminal Si Capacitor Embedded in 3D Functional Interposer for Power Delivery Network

Year: 2022

Type: conference-paper

Source: IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits)

DOI: 10.1109/vlsitechnologyandcir46769.2022.9830411

Authors: Kyosuke Kobinata, Tatsuya Funaki, Yoshiaki Satake, Hitoshi Matsuno, Seiji Hidaka, Shunsuke Abe, Hiroyuki Ito, Chih-Cheng Hsiao, Sheng Yi Li, Youngsuk Kim, Takayuki Ohba

Institutions: Tokyo Institute of Technology, Disco (japan), Industrial Technology Research Institute

Language: English

Topic: 3D IC and TSV technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4286571773

FWCI: 1.177

Cites:

Cited by: 6

Related to: 10