Work

Plasma wall interaction in H2 plasma processes

Year: 2014

Type: conference-paper

Source: HAL

Authors: Dubois, J, Posseme, N., Cunge, G., Latu-Romain, E., Vallier, L., Joubert, O.

Institutions: Laboratoire des Technologies de la Microélectronique, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4296980286

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