Work

In-situ electrical property quantification of memory devices by modulated electron microscopy

Year: 2023

Type: conference-paper

Source: Metrology, Inspection, and Process Control XXXVI

DOI: 10.1117/12.2658250

Authors: Muneyuki Fukuda, Kazuhisa Hasumi, Takashi Nobuhara, Hirohiko Kitsuki, Zhigang Wang, Kazuhiro Nojima, Yusaku Suzuki, Akira Hamaguchi, Masashi Kubo, Masaya Hosokawa

Institutions: Hitachi High-Tech (Japan), KIOXIA Corporation (Japan), Western Digital (Japan)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4367173106

FWCI: 0.448

Cites:

Cited by: 1

Related to: 10