Synergetic FeRAM/OxRAM memory array operation induced by oxygen vacancy interface engineering in Si:HfO2 ferroelectric films
Year: 2023
Type: conference-paper
Authors: Laurent Grenouillet, Simon Martin, Julie Laguerre, Justine Barbot, Nicolas Vaxelaire, Pierre-Marie Deleuze, Olivier Renault, Rabah Kies, Catherine Carabasse, Pattamon Dezest, Francois Aussenac, Richard Souil, Olivier Billoint, Elisa Vianello, Wassim Hamouda, Nick Barrett, Fracois Andrieu, Jean Coignus
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4390767017
