Work

Non-destructive measurement of bottom width in deep trench isolation structures using IRCD metrology

Year: 2024

Type: conference-paper

DOI: 10.1117/12.3010926

Authors: Nick Keller, Marc Poulingue, Ross Grynko, Troy Ribaudo, George A. Antonelli, Victor Li, Marcello Ravasio, Delphine Le Cunff

Institutions: Onto Innovation (United States), STMicroelectronics (Italy), STMicroelectronics (France)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4395083360

FWCI: 1.612

Cites: 16

Cited by: 2

Related to: 10