Work

Kinetics of low-temperature out-diffusion of copper from silicon wafers

Year: 1999

Type: article

Authors: Mohammad Bagher Shabani, S. Okuuchi, Y. Shimanuki

Language: English

Topic: Silicon and Solar Cell Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W55739709

FWCI:

Cites:

Cited by: 3

Related to: 10