Work

MEMS Tunable Capacitors With Fragmented Electrodes and Electro-Thermal Actuation

Year: 2004

Type: article

Source: Infoscience (Ecole Polytechnique Fédérale de Lausanne)

Authors: A. Mehdaoui, F. Casset, G. Bouche, P. Ancey, A. M. Ionescu

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: green

OpenAlex ID: W635896185

FWCI:

Cites:

Cited by: 1

Related to: 10