Work

Advanced FIB/SEM Sample Preparation and Analysis Techniques (2026 Update)

Year: 2026

Type: conference-paper

Source: Proceedings - International Symposium for Testing and Failure Analysis

DOI: 10.31399/asm.cp.istfa2026tp00r1

Authors: Sam Subramanian, Khiem Ly, Charles Petri, Tony Chrastecky, Rik Otte, Nick Pronin

Institution: NXP (United States)

Language: English

Topic: Integrated Circuits and Semiconductor Failure Analysis

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W7214889804

FWCI:

Cites:

Cited by:

Related to: 10