Effect of deposition temperature on the properties of CeO2 films grown by atomic layer deposition
Year: 2011
Type: article
Source: Thin Solid Films
Authors: P.J. King, M. Werner, P.R. Chalker, A.C. Jones, H.C. Aspinall, J. Basca, J.S. Wrench, K. Black, H.O. Davies, P.N. Heys
Institution: University of Liverpool
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W74104382