Work

RF-Sputtering of Silicon Nitride Layers on GaAs Substrates: Characterization of an Intermediate Layer Between the Substrate and the Deposited Film

Year: 1981

Type: book-chapter

Source: Springer eBooks

DOI: 10.1007/978-3-642-68247-6_48

Authors: L. M. F. Kaufmann, R. Tilders, K. Heime, H. W. Dinges

Institutions: University of Duisburg-Essen, Deutsche Bundespost

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W800455656

FWCI: 2.01

Cites: 9

Cited by: 2

Related to: 10