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Fabien Rozé

Oxidation kinetics of Si and SiGe by dry rapid thermal oxidation, in-situ steam generation oxidation and dry furnace oxidation
2017 · Fabien Rozé, Olivier Gourhant, et al. · Journal of Applied Physics · 23
Recent Progresses and Perspectives of UV Laser Annealing Technologies for Advanced CMOS Devices
2022 · Toshiyuki Tabata, Fabien Rozé, et al. · Electronics · 21
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(Invited) Laser Thermal Annealing for Low Thermal Budget Applications: From Contact Formation to Material Modification
2019 · Karim Huet, Toshiyuki Tabata, et al. · ECS Transactions · 12
Non-Equilibrium Growth of Surface Wrinkles Emerging in an SiO 2 /Si Stack during Si Melting Induced by UV Nanosecond Pulsed Laser Annealing
2022 · Imen Karmous, Fabien Rozé, et al. · ECS Journal of Solid State Science and Technology · 10
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Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects
2022 · Takeshi Nogami, Oleg Gluschenkov, et al. · IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits) · 10
Copper Large-Scale Grain Growth by UV Nanosecond Pulsed Laser Annealing
2021 · Toshiyuki Tabata, Pierre-Edouard Raynal, et al. · IEEE International Interconnect Technology Conference (IITC) · 10
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Non-doped HfO2 crystallization controlled by dwell time in laser annealing
2021 · Toshiyuki Tabata, Sebastien Halty, et al. · Applied Physics Express · 8
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A novel dual isolation scheme for stress and back-bias maximum efficiency in FDSOI Technology
2016 · R. Berthelon, F. Andrieu, et al. · Technical digest - International Electron Devices Meeting/Technical digest · 8
Microsecond non-melt UV laser annealing for future 3D-stacked CMOS
2022 · Toshiyuki Tabata, Fabien Rozé, et al. · Applied Physics Express · 7
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UV nanosecond laser annealing for Ru interconnects
2020 · Nicolas Jourdan, Fabien Roze, et al. · IEEE International Interconnect Technology Conference (IITC) · 7
Dopant Redistribution and Activation in Ga Ion-Implanted High Ge Content SiGe by Explosive Crystallization during UV Nanosecond Pulsed Laser Annealing
2021 · Toshiyuki Tabata, Huet Karim, et al. · ECS Journal of Solid State Science and Technology · 6
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Comparative Analysis of Growth Rate Enhancement and Ge Redistribution during Silicon-Germanium Oxidation by Rapid Thermal Oxidation
2016 · Fabien Rozé, Olivier Gourhant, et al. · ECS Transactions · 6
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Ni/4H-SiC ohmic contact formation using UV nanosecond laser annealing
2025 · Mathieu Opprecht, Sébastien Kerdilès, et al. · Physica Scripta · 5
Wrinkles Emerging in SiO2/Si Stack during UV Nanosecond Laser Anneal
2021 · Imen Karmous, Fabien Roze, et al. · ECS Transactions · 5
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Ni/4H-SiC Ohmic Contact Formation Using Multipulse Nanosecond Laser Annealing
2024 · Mathieu Opprecht, Sébastien Kerdilès, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 4
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SiGe oxidation kinetics and oxide density measured by resonant soft X-ray reflectivity
2017 · F. Roze, P. Gergaud, et al. · IEEE Nanotechnology Materials and Devices Conference (NMDC) · 4
Solid Phase Recrystallization in Arsenic Ion-Implanted Silicon-On-Insulator by Microsecond UV Laser Annealing
2021 · Toshiyuki Tabata, Fabien Roze, et al. · IEEE Journal of the Electron Devices Society · 3
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Overview of Ruthenium Thin Films Annealed by Microsecond Scanning UV Pulsed Laser: Structural, Electrical, and Failure Modes Analysis
2025 · Richard Daubriac, Leonardo Cancellara, et al. · Advanced Engineering Materials · 2
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Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path
2023 · Lu Lu, Nicolas Jourdan, et al. · IEEE International Interconnect Technology Conference and IEEE Materials for Advanced Metallization Conference (IITC/MAM) · 2
Impact of the buried oxide thickness in UV laser heated 3D stacks
2021 · Pierre Morin, Toshiyuki Tabata, et al. · International Conference on Solid State Devices and Materials (SSDM) · 2
Solid Phase Recrystallization and Dopant Activation in Arsenic Ion-Implanted Silicon-On-Insulator by UV Laser Annealing
2021 · Toshiyuki Tabata, Fabien Roze, et al. · International Workshop on Junction Technology · 2
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Wrinkles Emerging in SiO2/Si Stack During UV Nanosecond Laser Anneal
2021 · Imen Karmous, Fabien Roze, et al. · ECS Meeting Abstracts · 2
Low Resistivity Aluminum Doped Layers Formed Using High Dose High Temperature Implants and Laser Annealing
2024 · Fulvio Mazzamuto, Zeinab Chehadi, et al. · Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena · 1
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Study of Dopant Activation in Arsenic-Implanted Laser Annealed Si By Differential Hall Effect Metrology (DHEM)
2022 · Abhijeet Joshi, Toshiyuki Tabata, et al. · ECS Transactions · 1
Failure Mode Analysis in Microsecond UV Laser Annealing of Cu Thin Films
2022 · Remi Demoulin, Richard Daubriac, et al. · IEEE International Interconnect Technology Conference (IITC) · 1
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Works count: 33
Citation count: 165
H-index: 8
I10-index: 6
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