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Dmitriy V. Likhachev

Observed names: D. V. Likhachev, D.V. LIKHACHEV, D.V. Likhachev, Dmitriy Likhachev, Dmitriy V., Dmitry Likhachev, Likhachev, Dmitriy V
ORCID: 0000-0002-9842-528X
Observed ORCID: 0000-0002-9842-528X
OpenAlex ID: A5028986927
Modified Tauc–Lorentz dispersion model leading to a more accurate representation of absorption features below the bandgap
2015 · D.V. Likhachev, N. Malkova, et al. · Thin Solid Films · 81
Selecting the right number of knots for B-spline parameterization of the dielectric functions in spectroscopic ellipsometry data analysis
2017 · D.V. Likhachev · Thin Solid Films · 41
Model selection in spectroscopic ellipsometry data analysis: Combining an information criteria approach with screening sensitivity analysis
2016 · D.V. Likhachev · Applied Surface Science · 17
Efficient thin-film stack characterization using parametric sensitivity analysis for spectroscopic ellipsometry in semiconductor device fabrication
2015 · D.V. Likhachev · Thin Solid Films · 14
On the optimization of knot allocation for B-spline parameterization of the dielectric function in spectroscopic ellipsometry data analysis
2021 · D. V. Likhachev · Journal of Applied Physics · 12
Parametric sensitivity analysis as an essential ingredient of spectroscopic ellipsometry data modeling: An application of the Morris screening method
2019 · D. V. Likhachev · Journal of Applied Physics · 12
Spectroscopic ellipsometry data analysis using penalized splines representation for the dielectric function
2018 · D.V. Likhachev · Thin Solid Films · 12
A practical method for optical dispersion model selection and parameters variations in scatterometry analysis with variable n&k's
2014 · D.V. Likhachev · Thin Solid Films · 12
Certain topics in ellipsometric data modeling with splines: a review of recent developments
2022 · Dmitriy V. Likhachev · Advanced Optical Technologies · 10
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A practitioner's approach to evaluation strategy for ellipsometric measurements of multilayered and multiparametric thin-film structures
2015 · D.V. Likhachev · Thin Solid Films · 9
Evaluation of different dispersion models for correlation of spectroscopic ellipsometry and X-ray reflectometry
2019 · D. V. Likhachev · Review of Scientific Instruments · 8
Optimization of the dielectric-function modeling by B-splines in spectroscopic ellipsometry analysis: A hybrid approach
2022 · D.V. Likhachev · Thin Solid Films · 7
B-spline parameterization of the dielectric function and information criteria: the craft of non-overfitting
2017 · Dmitriy V. Likhachev · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7
Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage
2012 · Denis Shamiryan, Dmitriy V. · InTech eBooks · 7
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Quantitative characterization and modeling of sub-bandgap absorption features in thin oxide films from spectroscopic ellipsometry data
2015 · Dmitriy V. Likhachev, Natalia Malkova, et al. · AIMS Materials Science · 6
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Integrated ODP metrology with floating n&k's for lithography process
2009 · Patrick Kearney, Dmitriy Likhachev, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
Low-k n&k variation impact on CD accuracy of scatterometry
2008 · Yan Chen, Masahiro Yamamoto, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
On the selection of Morris trajectories for parametric sensitivity analysis in spectroscopic ellipsometry modeling
2023 · D. V. Likhachev · Journal of Applied Physics · 2
Context-based virtual metrology
2018 · Dmitriy Likhachev, Carstem Hartig, et al. · Metrology, Inspection, and Process Control XXXVI · 2
In-line control of material properties of SiOC:H based low-k dielectrics utilizing optical metrology AM: Advanced metrology
2017 · Adam M. Urbanowicz, Peter Ebersbach, et al. · ASMC proceedings · 2
Characterization of complex inter-layer dielectric stack by spectroscopic ellipsometry: A simple method to reduce parameters correlations
2013 · D.V. Likhachev · Thin Solid Films · 2
Dielectric function parameterization by penalized splines
2017 · Dmitriy V. Likhachev · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Monitoring of ion implantation in microelectronics production environment using multi-channel reflectometry
2016 · Peter Ebersbach, Adam M. Urbanowicz, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Dielectric function representation by fractional (non-integer) oscillators in the model-based optical metrology
2026 · D. V. Likhachev · Journal of Applied Physics
Spectroscopic ellipsometry characterization of multilayer dielectric stacks on the non-ideal substrates in the microelectronics industry
2024 · Dmitriy V. Likhachev · Journal of Micro/Nanopatterning Materials and Metrology
Works count: 33
Citation count: 273
H-index: 9
I10-index: 9
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