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Matthew M. Besen

Observed names: Besen Matthew M, Besen, M., M. Besen, M.M. Besen, Matthew Besen
OpenAlex ID: A5048986527
Energy Confinement of High-Density Pellet-Fueled Plasmas in the Alcator C Tokamak
1984 · M. Greenwald, D. Gwinn, et al. · Physical Review Letters · 253
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Application of a high-brightness electrodeless Z-pinch EUV source for metrology, inspection, and resist development
2006 · Stephen F. Horne, Matthew M. Besen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 31
Extreme-ultraviolet light source development to enable pre-production mask inspection
2012 · Matthew Partlow, Matthew Besen, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 29
A novel high-brightness broadband light-source technology from the VUV to the IR
2010 · Stephen Horne, Don Smith, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 26
EUV source development at Energetiq
2008 · Paul A. Blackborow, Matthew J. Partlow, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
Application of the Energetiq EQ-10 electrodeless Z-Pinch EUV light source in outgassing and exposure of EUV photoresist
2007 · Paul A. Blackborow, Deborah S. Gustafson, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
Large area diamond reactor using a high flow velocity microwave plasma jet
1992 · D.K. Smith, E. Sevillano, et al. · Diamond and Related Materials · 10
High brightness electrodeless Z-Pinch EUV source for mask inspection tools
2012 · Stephen F. Horne, Matthew J. Partlow, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Development of a high-pulse-rate EUV source
2009 · Stephen F. Horne, Fred M. Niell, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
EUV source development for AIMS and blank inspection
2010 · Paul A. Blackborow, Matthew J. Partlow, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
Studies of the regime of improved particle and energy confinement following pellet injection into Alcator C
1986 · M. Greenwald, Matthew M. Besen, et al. · 4
Vis-NIR spectral flatness improvement for Laser-Driven Light Sources (LDLS)
2018 · Xiaohua Ye, Huiling Zhu, et al. · Nonimaging Optics: Efficient Design for Illumination and Concentration · 3
Engineering features of the Alcator C-Mod tokamak
2015 · Becker, H., Besen, M., et al. · DSpace@MIT (Massachusetts Institute of Technology) · 3
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EQ-10 electrodeless Z-pinch EUV source for metrology applications
2011 · Deborah Gustafson, Stephen F. Horne, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Improvements in the EQ-10 electrodeless Z-pinch EUV source for metrology applications
2011 · Stephen F. Horne, Deborah Gustafson, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
LDLS Powered High Throughput Tunable Light Source
2018 · X. Ye, A. Cutler, et al. · Frontiers in Optics · 2
Sliding Joint and Bond Development Program for the Alcator C-Mod Toroidal Field Coils
1986 · W.K. Beck, H.D. Becker, et al. · Fusion Technology · 2
Engineering Aspects of Lower Hybrid Microwave Injection into the Alcator C Tokamak
1983 · J. J. Schuss, M. Porkolab, et al. · Nuclear Technology - Fusion · 2
EUVフォトレジストの脱ガス及び露光時のEnergetiq EQ-10 Electrodeless Z-Pinch TM EUV光源の適用
2007 · Blackborow Paul A, Gustafson Deborah S, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1
Use of a remote plasma source for CVD chamber clean and exhaust gas abatement applications
2003 · W. Holber, X. Chen, et al. · IEEE International Conference on Plasma Science (ICOPS) · 1
The EQ-10 Electrodeless Z-Pinch™ Metrology Source
2018 · Stephen F. Horne, Matthew M. Besen, et al. · SPIE eBooks
Works count: 22
Citation count: 412
H-index: 8
I10-index: 7
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