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Akihiko Teshigahara

Observed names: Akihiko TESHIGAHARA, Teshigahara, Akihiko
ORCID: 0009-0003-0790-0159
Observed ORCID: 0009-0003-0790-0159
OpenAlex ID: A5061396825
Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
2008 · Morito Akiyama, Toshihiro Kamohara, et al. · Advanced Materials · 1,098
Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films
2009 · Morito Akiyama, Kazuhiko Kano, et al. · Applied Physics Letters · 418
Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films
2008 · Morito Akiyama, Toshihiro Kamohara, et al. · Applied Physics Letters · 85
High-SPL Air-Coupled Piezoelectric Micromachined Ultrasonic Transducers Based on 36% ScAlN Thin-Film
2019 · Yuri Kusano, Itaru Ishii, et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 68
Preparation of scandium aluminum nitride thin films by using scandium aluminum alloy sputtering target and design of experiments
2010 · Morito AKIYAMA, Tatsuo TABARU, et al. · Journal of the Ceramic Society of Japan · 67
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Strong enhancement of piezoelectric constants in Sc x Al1− x N: First-principles calculations
2016 · Hiroyoshi Momida, Akihiko Teshigahara, et al. · AIP Advances · 58
Scandium aluminum nitride: Highly piezoelectric thin film for RF SAW devices in multi GHz range
2012 · Akihiko Teshigahara, Ken-ya Hashimoto, et al. · IEEE International Ultrasonics Symposium · 57
Giant shear mode electromechanical coupling coefficient k15 in c-axis tilted ScAlN films
2010 · Takahiko Yanagitani, Kazuki Arakawa, et al. · IEEE International Ultrasonics Symposium · 56
Influence of sputtering pressure on polarity distribution of aluminum nitride thin films
2006 · Toshihiro Kamohara, Morito Akiyama, et al. · Applied Physics Letters · 52
ScAlN Lamb wave resonator in GHz range released by XeF2 etching
2013 · Akira Konno, Masahiro Sumisaka, et al. · IEEE International Ultrasonics Symposium · 51
High Q surface acoustic wave resonators in 2–3 GHz range using ScAlN/single crystalline diamond structure
2012 · Ken-ya Hashimoto, Takamasa Fujii, et al. · IEEE International Ultrasonics Symposium · 46
Polarity inversion in aluminum nitride thin films under high sputtering power
2007 · Morito Akiyama, Toshihiro Kamohara, et al. · Applied Physics Letters · 43
Enhancement of effective electromechanical coupling factor by mass loading in layered surface acoustic wave device structures
2016 · Gongbin Tang, Tao Han, et al. · Japanese Journal of Applied Physics · 39
Wave Propagation Direction and c-Axis Tilt Angle Influence on the Performance of ScAlN/Sapphire-Based SAW Devices
2016 · Abhay Kochhar, Yasuo Yamamoto, et al. · IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control · 30
36% Scandium-Doped Aluminum Nitride Piezoelectric Micromachined Ultrasonic Transducers
2018 · Yuri Kusano, Guo-Lun Luo, et al. · IEEE International Ultrasonics Symposium · 25
Deposition techniques of c-axis-tilted ScAlN films by conventional RF magnetron sputtering
2010 · Kazuki Arakawa, Takahiko Yanagitani, et al. · IEEE International Ultrasonics Symposium · 20
Enhancement of effective electromechanical coupling factor by mass loading in layered SAW device structures
2015 · Gongbin Tang, Tao Han, et al. · Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) · 13
High performance surface acoustic resonators in 1–3 GHz range using ScAlN/6H-SiC structure
2012 · Ken-ya Hashimoto, Shuhei Sato, et al. · IEEE MTT-S International Microwave Symposium digest · 11
Development of pMUT Linear Array Included with Fresnel Zone Plate Focusing Function
2025 · Tatsuya Shimoyama, Akihiko Teshigahara, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 3
Reduction mechanism of loss tangent of scandium-doped aluminum nitride thin film by post-deposition annealing
2024 · Akihiko Teshigahara, Tetsuya Enomoto, et al. · Japanese Journal of Applied Physics · 3
NSPUDT using c-axis tilted ScAlN thin film
2015 · Abhay Kochhar, Yasuo Yamamoto, et al. · Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS) · 3
Influence of underlayer roughness on the properties of Sc0.4Al0.6N thin films prepared via sputter deposition
2024 · Akihiko Teshigahara, Tetsuya Enomoto, et al. · Japanese Journal of Applied Physics · 2
Characterization of thin ScAlN film based natural single-phase unidirectional SAW transducers using Sagnac interferometer
2015 · Abhay Kochhar, Tasuku Suzuki, et al. · IEEE International Ultrasonics Symposium · 2
Development of piezoelectric micromachined ultrasonic transducer linear array including focusing function based on principle of fresnel zone plate
2026 · Tatsuya Shimoyama, Akihiko Teshigahara, et al. · Sensors and Actuators A Physical · 1
Giant shear mode electromechanical coupling in c-axis tilted ScAlN films
2010 · Takahiko Yanagitani, Kazuki Arakawa, et al. · IEICE Technical Report; IEICE Tech. Rep. · 1
Works count: 32
Citation count: 2,253
H-index: 16
I10-index: 18
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