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Gwang-Seok Chae

Observed name: Gwang-seock Chae
ORCID: 0000-0003-1364-6671
Observed ORCID: 0000-0003-1364-6671
OpenAlex ID: A5064324704
Real-time monitoring of the plasma density distribution in low-pressure plasmas using a flat-cutoff array sensor
2023 · H. J. Yeom, Min Young Yoon, et al. · Applied Physics Letters · 16
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Analysis of the transmission spectrum of the microwave cutoff probe influenced by the sheath around the probe
2023 · H. J. Yeom, Young-Gi Kim, et al. · Journal of Applied Physics · 14
Effect of impurities in vacuum vessels on the plasma parameters in inductive discharges
2023 · Young-Gi Kim, H.J. Yeom, et al. · Vacuum · 11
Unintended gas breakdowns in narrow gaps of advanced plasma sources for semiconductor fabrication industry
2023 · Sung Hyun Son, Geunwoo Go, et al. · Applied Physics Letters · 10
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Computational Study on Transmission Spectra Considering Coaxial Cable of Cutoff Probes
2024 · Hee-Jung Yeom, Gwang-Seok Chae, et al. · Applied Science and Convergence Technology · 9
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Analysis of uncertainty in measurement of electron temperature in low-pressure inductively coupled plasmas using microwave cutoff probe
2024 · Hee-Jung Yeom, Gwang-Seok Chae, et al. · Plasma Sources Science and Technology · 7
Development of a flat cutoff probe covered with a dielectric layer for non-invasive plasma diagnostics
2024 · Gwang-Seok Chae, Hee-Jung Yeom, et al. · Plasma Sources Science and Technology · 5
Effect of radiofrequency bias power on transmission spectrum of flat-cutoff sensor in inductively coupled plasma
2024 · Hee-Jung Yeom, Gwang-Seok Chae, et al. · Physics of Plasmas · 5
Influence of plasma parameters on low-k SiCOH film grown by plasma-enhanced chemical vapor deposition using dimethyldimethoxysilane
2023 · Jinseok Choi, H.J. Yeom, et al. · Vacuum · 5
Analysis of the transmission spectrum of the flat-cutoff sensors on wafers with metal layer
2023 · H. J. Yeom, Gwang-Seok Chae, et al. · Journal of Applied Physics · 5
Plasma Knowledge-Based Polymorphic Engineering for Two-Dimensional Semiconductor Contacts
2026 · Ji Won Heo, Gwang-Seok Chae, et al. · ACS Nano · 4
Computational Study of Transmission Spectra in the Flat Cutoff Probe with Inhomogeneous Electron Density Profiles
2025 · Gwang-Seok Chae, Hee-Jung Yeom, et al. · Applied Science and Convergence Technology · 3
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Tabletop extreme ultraviolet test platform for optical property evaluation of lithography materials
2026 · Eun-Seok Choe, Wooram Kim, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2
Effect of pulsed bias power on electron density modulation in inductively coupled plasma
2025 · Gwang-Seok Chae, Youbin Seol, et al. · Applied Physics Letters · 2
Re-deposition and etching characteristics of plasma-exposed ceramics for semiconductor etching equipment
2026 · Seong-Hyeon Kim, Min Young Yoon, et al. · Vacuum
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Effects of transport loss on quadrupole mass spectrometer measurements in nitrogen plasmas
2026 · Min Young Yoon, Sijun Kim, et al. · Vacuum
Effect of magnetic-field orientation on electron-density measurement using microwave cutoff probes in weakly magnetized plasma
2026 · Jae-Heon Lee, Do-Yeon Hwang, et al. · Journal of Applied Physics
A Non-Coaxial Microwave Patch Sensor for Cutoff-Based Electron Density Measurement in ICP Plasmas
2026 · Jung-Hyung Kim, Gwang-Seok Chae, et al. · IEEE International Conference on Plasma Science (ICOPS)
Analysis of electron series resonance in low-pressure plasmas using a DC-biased cutoff probe
2026 · Gwang-Seok Chae, Chan-Won Park, et al. · Plasma Sources Science and Technology
Plasma density measurement using phase-resolved optical emission spectroscopy in low-pressure capacitively coupled plasmas
2026 · Chan-Won Park, Julian Schulze, et al. · Plasma Sources Science and Technology
Development of a Wafer-Embeddable Microwave Patch Antenna Sensor for Plasma Diagnostics in Semiconductor Processing
2026 · Gwang-Seok Chae, Hee-Jung Yeom, et al. · IEEE Transactions on Instrumentation and Measurement
Effect of probe structure on wave transmission spectra of microwave cutoff probe
2024 · Jae-Heon Lee, Hee-Jung Yeom, et al. · Journal of Applied Physics
Computational Study of the Electrical Conductivity of the Antenna on the Transmission Spectra of the Flat Cutoff Sensor
2024 · Gwang-Seok Chae, Hee-Jung Yeom, et al. · Applied Science and Convergence Technology
Investigating the Effect of Plasma Parameters on the Dielectric Constant of Sicoh Thin Films Grown by PECVD Using Dimethyldimethoxysilane
2023 · Jinseok Choi, Gwang-Seok Chae, et al. · ECS Meeting Abstracts
Works count: 24
Citation count: 98
H-index: 6
I10-index: 4
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