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Bo H. Vanderberg
Observed names:
B. H. Vanderberg,
B. Vanderberg,
B.H. Vanderberg,
Bo Vanderberg
Institution:
Axcelis Technologies (United States)
Observed institutions:
Axcelis Technologies (United States),
Uppsala University,
Eaton (United States),
KTH Royal Institute of Technology
ORCID:
0000-0003-3006-2010
Observed ORCID:
0000-0003-3006-2010
OpenAlex ID:
A5066924537
Low energy ion beam transport
2002
·
M.A. Graf
, B. Vanderberg
, et al.
·
International Conference on Ion Implantation Technology
·
9
Introducing Purion H, a scanned spot beam high current ion implanter
2014
·
Bo Vanderberg
, Patrick Heres
, et al.
·
International Conference on Ion Implantation Technology
·
6
Microwave ECR plasma electron flood for low pressure wafer charge neutralization
2012
·
Bo Vanderberg
, Tomoya Nakatsugawa
, et al.
·
AIP conference proceedings
·
5
Reduction of crossed-field diode transmitted current due to anode secondary emission
1998
·
V. P. Gopinath
, B. H. Vanderberg
·
Physics of Plasmas
·
5
Measurement and interpretation of current transmission in a crossed-field diode below cutoff
1997
·
Bo H. Vanderberg
, Jan E. Eninger
·
Physics of Plasmas
·
5
Parametric scaling study of a magnetically insulated thermionic vacuum switch
1996
·
B.H. Vanderberg
, J.E. Eninger
·
IEEE Transactions on Plasma Science
·
4
Implant Angle Control on Optima MD
2006
·
R. D. Rathmell
, B. Vanderberg
, et al.
·
AIP conference proceedings
·
2
Evaluation of electrode materials for ion implanters
2003
·
B.H. Vanderberg
, A.S. Perel
, et al.
·
International Conference on Ion Implantation Technology
·
2
Optima MD: Mid-Dose, Hybrid-Scan Ion Implanter
2006
·
K. W. Wenzel
, A. M. Ray
, et al.
·
AIP conference proceedings
·
1
Scaling Experiments On A Magnetically Insulated Thermionic Vacuum Switch
2005
·
J.E. Eninger
, B.H. Vanderberg
·
IEEE International Conference on Plasma Science (ICOPS)
·
1
Measurement and Interpretation of Beam Oscillation and Noise Frequencies After Ion Beam Extraction in an Ion Beam Implanter
2026
·
Bo H. Vanderberg
·
IEEE International Conference on Plasma Science (ICOPS)
Ion Transport and Implant Control
2026
·
Bo Vanderberg
, Edward Eisner
·
Topics in applied physics
Ion implanter beam optics design using global optimization techniques
2022
·
Bo Vanderberg
, Steve Drummond
, et al.
·
MRS Advances
Recent advances in plasma-based ion sources for commercial ion implantation of semiconductors
2003
·
T.N. Horsky
, B.H. Vanderberg
·
IEEE International Conference on Plasma Science (ICOPS)
Importance of repeller voltage on ion current generation in an arc ion source
2003
·
B.H. Vanderberg
, T.N. Horsky
·
IEEE International Conference on Plasma Science (ICOPS)
Matching of an inductive storage pulsed power generator to a nonlinear gas discharge load for ozone production
2002
·
B.H. Vanderberg
, J.O. Nilsson
, et al.
·
IEEE International Conference on Plasma Science (ICOPS)
Modeling the effects of anode secondary electron emission on transmitted current in crossed-field diodes
1996
·
Venkatesh Gopinath
, B.H. Vanderberg
·
APS
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Works count:
17
Citation count:
40
H-index:
5
I10-index:
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