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Stephen F. Horne

Observed name: Stephen Horne
OpenAlex ID: A5071562591
Application of a high-brightness electrodeless Z-pinch EUV source for metrology, inspection, and resist development
2006 · Stephen F. Horne, Matthew M. Besen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 31
Extreme-ultraviolet light source development to enable pre-production mask inspection
2012 · Matthew Partlow, Matthew Besen, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 29
A Solid 500 Sun Compound Concentrator PV Design
2006 · Stephen Horne, Gary Conley, et al. · World Conference on Photovoltaic Energy Conversion · 28
A novel high-brightness broadband light-source technology from the VUV to the IR
2010 · Stephen Horne, Don Smith, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 26
EUV source development at Energetiq
2008 · Paul A. Blackborow, Matthew J. Partlow, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
Extreme ultraviolet interference lithography with incoherent light
2007 · Patrick P. Naulleau, Christopher N. Anderson, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
Application of the Energetiq EQ-10 electrodeless Z-Pinch EUV light source in outgassing and exposure of EUV photoresist
2007 · Paul A. Blackborow, Deborah S. Gustafson, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11
High brightness electrodeless Z-Pinch EUV source for mask inspection tools
2012 · Stephen F. Horne, Matthew J. Partlow, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Development of a high-pulse-rate EUV source
2009 · Stephen F. Horne, Fred M. Niell, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 5
EUV source development for AIMS and blank inspection
2010 · Paul A. Blackborow, Matthew J. Partlow, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4
EQ-10 electrodeless Z-pinch EUV source for metrology applications
2011 · Deborah Gustafson, Stephen F. Horne, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Improvements in the EQ-10 electrodeless Z-pinch EUV source for metrology applications
2011 · Stephen F. Horne, Deborah Gustafson, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
a Numerical Simulation of Ion Confinement in the Phaedrus Plugs.
1984 · Stephen F. Horne · 2
The Electrode-less Z-pinch Metrology Source
2023 · Stephen Horne, Matthew J. Partlow, et al. · SPIE eBooks · 1
High Brightness Broadband Infrared Light Source, from 0.3 to 20 Microns
2019 · R. Collins, A. Cutler, et al. · Conference on Lasers and Electro-Optics
The EQ-10 Electrodeless Z-Pinch™ Metrology Source
2018 · Stephen F. Horne, Matthew M. Besen, et al. · SPIE eBooks
Affordable x-ray microscopy with nanoscale resolution
2013 · James Evans, Paul A. Blackborow, et al.
Works count: 18
Citation count: 173
H-index: 8
I10-index: 7
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