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Hyo‐Chang Lee

Observed names: H C LEE, H C Lee, H. C. Lee, Hyo Chang Lee, Hyo-Chang Lee, Hyo-chang Lee, Hyochang Lee, Lee, Hyo-Chang
Observed institutions: Korea Advanced Institute of Science and Technology, Yonsei University, Korea Aerospace University, Korea Research Institute of Standards and Science, Korea Institute of Fusion Energy, Korea Institute of Ceramic Engineering and Technology, Hanyang University
ORCID: 0000-0003-2754-1512
Observed ORCID: 0000-0003-2754-1512
OpenAlex ID: A5074901895
Review of inductively coupled plasmas: Nano-applications and bistable hysteresis physics
2018 · Hyo-Chang Lee · Applied Physics Reviews · 192
Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma
2010 · Hyo-Chang Lee, Min-Hyong Lee, et al. · Applied Physics Letters · 106
Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmas
2010 · Hyo-Chang Lee, Min-Hyong Lee, et al. · Applied Physics Letters · 99
Evolution of the electron energy distribution and E-H mode transition in inductively coupled nitrogen plasma
2010 · Hyo-Chang Lee, Jung-Kyu Lee, et al. · Physics of Plasmas · 74
Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias
2021 · Min Young Yoon, H. J. Yeom, et al. · Physics of Plasmas · 71
Collisionless electron heating by radio frequency bias in low gas pressure inductive discharge
2012 · Hyo-Chang Lee, Chin-Wook Chung · Applied Physics Letters · 65
Plasma etching of the trench pattern with high aspect ratio mask under ion tilting
2022 · Min Young Yoon, H.J. Yeom, et al. · Applied Surface Science · 64
Flat cutoff probe for real-time electron density measurement in industrial plasma processing
2019 · H J Yeom, J H Kim, et al. · Plasma Sources Science and Technology · 53
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Effects of RF bias power on electron energy distribution function and plasma uniformity in inductively coupled argon plasma
2011 · Hyo-Chang Lee, Jin-Young Bang, et al. · Thin Solid Films · 48
Review of the gas breakdown physics and nanomaterial-based ionization gas sensors and their applications
2021 · June Young Kim, Igor Kaganovich, et al. · Plasma Sources Science and Technology · 45
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Discharge mode transition and hysteresis in inductively coupled plasma
2013 · Hyo-Chang Lee, Dong-Hwan Kim, et al. · Applied Physics Letters · 45
Evolution of electron temperature in inductively coupled plasma
2017 · Hyo-Chang Lee, B. H. Seo, et al. · Applied Physics Letters · 44
E–H mode transition in inductively coupled plasma using Ar, O2, N2, and mixture gas
2011 · Jung-Kyu Lee, Hyo-Chang Lee, et al. · Current Applied Physics · 43
Spatial Design of Childcare Facilities Based on Biophilic Design Patterns
2019 · Sung Jun Park, Hyo Chang Lee · Sustainability · 41
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Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmas
2010 · Min-Hyong Lee, Hyo-Chang Lee, et al. · Physical Review E · 41
Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes
2012 · Hyo-Chang Lee, Chin-Wook Chung · Physics of Plasmas · 40
Low energy electron heating and evolution of the electron energy distribution by diluted O2 in an inductive Ar/O2 mixture discharge
2010 · Hyo-Chang Lee, Min-Hyong Lee, et al. · Physics of Plasmas · 39
Experimental observation of the skin effect on plasma uniformity in inductively coupled plasmas with a radio frequency bias
2012 · Hyo-Chang Lee, SeungJu Oh, et al. · Plasma Sources Science and Technology · 38
Effect of Electron Energy Distribution on the Hysteresis of Plasma Discharge: Theory, Experiment and Modeling
2015 · Hyo-Chang Lee, Chin-Wook Chung · Scientific Reports · 35
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Correlation with the Microstructure and Synergistic Physiochemical Etching Resistance of Nanocomposites under Fluorine-Containing Plasma Conditions
2022 · Ho Jin Ma, Seongwan Hong, et al. · ACS Applied Materials & Interfaces · 32
Experimental verification of the Boltzmann relation in confined plasmas: Comparison of noble and molecule gases
2013 · Hyo-Chang Lee, Hye-Ju Hwang, et al. · Physics of Plasmas · 31
Physiochemical etching characteristics and surface analysis of Y2O3-MgO nanocomposite under different CF4/Ar/O2 plasma atmospheres
2023 · Ho Jin Ma, Young-Jo Park, et al. · Applied Surface Science · 30
Generation of carbon nanowhiskers, nanotips, and nanodots by controlling plasma environment: Ion energy and radical effects
2020 · Daehan Choi, H.J. Yeom, et al. · Carbon · 27
Experimental and computational investigations of the effect of the electrode gap on capacitively coupled radio frequency oxygen discharges
2019 · K. H. You, J. Schulze, et al. · Physics of Plasmas · 27
Effect of antenna size on electron kinetics in inductively coupled plasmas
2013 · Hyo-Chang Lee, Chin-Wook Chung · Physics of Plasmas · 26
Works count: 223
Citation count: 2,306
H-index: 25
I10-index: 68
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