Author

Robert Kazinczi

Observed names: R Kazinczi, R. Kazinczi

Observed institutions: Hungarian Academy of Sciences, ASML (Netherlands), Delft University of Technology

OpenAlex ID: A5079539705

ASML's NXE platform performance and volume introduction

2013 · Rudy Peeters, Sjoerd Lok, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 76

Performance of FlexRay: a fully programmable illumination system for generation of freeform sources on high NA immersion systems

2010 · Melchior Mulder, André Engelen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 52

Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process

2009 · Kafai Lai, Alan E. Rosenbluth, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 47

Novel methods for preparing EC STM tips

1998 · R. Kazinczi, E. Szõcs, et al. · Applied Physics A · 39

Performance of a programmable illuminator for generation of freeform sources on high NA immersion systems

2009 · Melchior Mulder, André Engelen, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 28

LPP EUV source readiness for NXE 3300B

2014 · David C. Brandt, Igor V. Fomenkov, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 25

Galvanic etching for sensor fabrication

2000 · C M A Ashruf, P J French, et al. · Journal of Micromechanics and Microengineering · 23

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Extending 1.35 NA immersion lithography down to 1x nm production nodes

2012 · Igor Bouchoms, Martijn Leenders, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 17

Versatile tool for characterising long-term stability and reliability of micromechanical structures

2000 · R Kazinczi, J.R Mollinger, et al. · Sensors and Actuators A Physical · 14

New failure mechanism in silicon nitride resonators

2002 · R. Kazinczi, J.R. Mollinger, et al. · IEEE International Conference on Micro Electro Mechanical Systems (MEMS) · 12

Laser produced plasma light source development for HVM

2014 · Igor V. Fomenkov, David C. Brandt, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 11

Reliability of silicon nitride as structural material in MEMS

1999 · Robert Kazinczi, Jeff R. Mollinger, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 10

Environment-induced failure modes of thin film resonators

2002 · Robert Kazinczi, Jeff R. Mollinger, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 7

Novel lithography approach using feed-forward mask-based wafer CDU correction increase fab productivity and yield

2009 · Shmoolik Mangan, Erik Byers, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6

Reliability of micromechanical thin-film resonators

2002 · Robert Kazinczi · Research Repository (Delft University of Technology) · 6

Design of low-cost resonant mode sensors

2001 · Robert Kazinczi, P. Turmezei, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6

Environment-induced failure modes of thin film resonators

2001 · Robert Kazinczi, Jeff R. Mollinger, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 6

Adsorption-Induced Failure Modes of Thin-Film Resonators

2001 · R. Kazinczi, J.R. Mollinger, et al. · MRS Proceedings · 6

Down-Scale Problems of Resonant Mode SiC Devices

2000 · R. Kazinczi, J. R. Mollinger, et al. · ASME International Mechanical Engineering Congress and Exposition (IMECE) · 5

Aerial imaging qualification and metrology for source mask optimization

2010 · Amir Sagiv, Jo Finders, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4

An IntenCD map of a reticle as a feed-forward input to DoseMapper

2008 · Michael Ben Yishai, Jo Finders, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 4

Inexpensive MEMS Packaging

2001 · R. Kazinczi, J. R. Mollinger, et al. · Springer eBooks · 2

Aerial imaging for source mask optimization: mask and illumination qualification

2009 · Amir Sagiv, Jo Finders, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1

Works count: 25

Citation count: 407

H-index: 11

I10-index: 12