2009 · Heinz D. Wanzenboeck, Simon Waid, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 15

Optimization of 3D patterning by Ga implantation and reactive ion etching (RIE) for nanoimprint lithography (NIL) stamp fabrication

2012 · Simon Waid, Heinz D. Wanzenboeck, et al. · Microelectronic Engineering · 13

Nanoimprint lithography using IR laser irradiation

2006 · V. Grigaliūnas, S. Tamulevičius, et al. · Applied Surface Science · 12

Mastering of NIL Stamps with Undercut T-Shaped Features from Single Layer to Multilayer Stamps

2021 · Philipp Taus, Adrian Prinz, et al. · Nanomaterials · 11

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Nano- and microstructuring of graphene using UV-NIL

2012 · Iris Bergmair, Wolfgang Hackl, et al. · Nanotechnology · 10

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Generation of 3D nanopatterns with smooth surfaces

2014 · Simon Waid, Heinz D Wanzenboeck, et al. · Nanotechnology · 9

Alternative approach to transparent stamps for UV-based nanoimprint lithography: techniques and materials

2008 · Anna Klukowska, Marko Vogler, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 7

Focused ion beam induced Ga-contamination—An obstacle for UV-nanoimprint stamp repair?

2013 · Simon Waid, Heinz D. Wanzenboeck, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 6

Biomolecular Detection Based on the Rotational Dynamics of Magneto-Plasmonic Nanoparticles

2017 · Astrit Shoshi, Pia Schneeweiss, et al. · EUROSENSORS Conference (EUROSENSORS) · 4

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Focused ion beam direct patterning of hardmask layers

2014 · Simon Waid, Heinz D. Wanzenboeck, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 4

Editorial for Special Issue: Nanoimprint Lithography Technology and Applications

2021 · Michael Muehlberger · Nanomaterials · 2

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Soft UV-NIL at the 12.5 nm scale

2011 · G. Kreindl, M. Kast, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2

Two-photon polymerization lithography as a mastering tool for nanoimprint lithography

2025 · Stjepan Perak, Sonja Kopp, et al. · European Mask and Lithography Conference (EMLC)

Combining 2-photon Polymerization and Nanoimprint Litography for Thrombogenicity Assessment in Left Ventricular Assist Devices

2024 · Stjepan Perak, Marta Bonora, et al.

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Works count: 20

Citation count: 263

H-index: 10

I10-index: 11