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Margarita Günther
Observed names:
Günther, Margarita,
M. GÜNTHER,
M. Günther
Institution:
Technische Universität Dresden
Observed institutions:
Chemnitz University of Technology,
Technische Universität Dresden
OpenAlex ID:
A5113634672
Mid-frequency PECVD of a-SiCN:H films and their structural, mechanical and electrical properties
2012
·
S. Peter
, M. Günther
, et al.
·
Vacuum
·
33
Experimental analysis of the thermal annealing of hard a-C:H films
2014
·
S. Peter
, M. Günther
, et al.
·
Diamond and Related Materials
·
29
A comparative analysis of a-C:H films deposited from five hydrocarbons by thermal desorption spectroscopy
2011
·
S. Peter
, M. Günther
, et al.
·
Vacuum
·
17
High rate deposition of hard a-C:H films using microwave excited plasma enhanced CVD
2011
·
M. Günther
, I. Bialuch
, et al.
·
Surface and Coatings Technology
·
14
Low temperature plasma enhanced chemical vapor deposition of thin films combining mechanical stiffness, electrical insulation, and homogeneity in microcavities
2010
·
S. Peter
, M. Günther
, et al.
·
Journal of Applied Physics
·
14
Mid-frequency deposition of a-C:H films using five different precursors
2010
·
S. Peter
, M. Günther
, et al.
·
Vacuum
·
14
Mid-frequency deposition of a-C:H films using five different precursors
2010
·
S. Peter
, M. Günther
, et al.
·
Vacuum
·
6
Impedimetrischer Inline-Biofilmsensor
2022
·
Annekatrin Delan
, Michael Becker
, et al.
·
tm - Technisches Messen
·
1
P9.8 - Biochemische piezoresistive Sensorkonzepte für die Biotechnologie und medizinische Anwendungen
2015
·
U. Schmidt
, M. Günther
, et al.
·
Tagungsband
·
1
PDF
HUMIDITY AND TEMPERATURE SENSOR PROPERTIES OF p - Si / POLYIMIDE / C 60 NANOSTRUCTURES WITH SWIFT HEAVY ION TRACKS
2009
·
A. V. PETROV
, E. Yu. KANIUKOV
, et al.
·
Physics, Chemistry and Application of Nanostructures
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Works count:
11
Citation count:
129
H-index:
6
I10-index:
6
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