Concept

Advanced process control

OpenAlex ID: C157978775

A plant-wide industrial process control problem

1993 · J.J. Downs, E.F. Vogel · Computers & Chemical Engineering · 3,396

Process Control

1995 · Thomas E. Marlin · 978

Plantwide process control

1999 · Kelvin T. Erickson, John L. Hedrick · Wiley eBooks · 438

Review of the applications of neural networks in chemical process control — simulation and online implementation

1999 · Mohamed Azlan Hussain · Artificial Intelligence in Engineering · 386

Run by run process control: combining SPC and feedback control

1995 · E. Sachs, A. Hu, et al. · IEEE Transactions on Semiconductor Manufacturing · 328

Economic assessment of advanced process control – A survey and framework

2007 · Margret Bauer, Ian K. Craig · Journal of Process Control · 260

Optimizing Process Economic Performance Using Model Predictive Control

2009 · James B. Rawlings, Rishi Amrit · Lecture notes in control and information sciences · 256

Bioprocess control: Advances and challenges

2006 · Joseph S. Alford · Computers & Chemical Engineering · 240

Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry

1994 · S.W. Butler, J.A. Stefani · IEEE Transactions on Semiconductor Manufacturing · 235

Process Control Instrumentation Technology

1969 · Curtis D. Johnson · 231

Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities

2000 · Thomas F. Edgar, Stephanie W. Butler, et al. · Automatica · 212

Run-to-Run Control in Semiconductor Manufacturing

2010 · CRC Press eBooks · 211

Data-Driven Soft Sensor Approach for Quality Prediction in a Refining Process

2009 · D. Wang, Jun Liu, et al. · IEEE Transactions on Industrial Informatics · 199

Automatic process control in anaerobic digestion technology: A critical review

2015 · Duc Nguyen, Venkataramana Gadhamshetty, et al. · Bioresource Technology · 183

Semiconductor manufacturing process control and monitoring: A fab-wide framework

2005 · S. Joe Qin, Gregory Cherry, et al. · Journal of Process Control · 175

Process Monitoring, Diagnosis and Control of Additive Manufacturing

2022 · Qihang Fang, Gang Xiong, et al. · IEEE Transactions on Automation Science and Engineering · 156

Dynamic modelling and optimisation of flexible operation in post-combustion CO2 capture plants—A review

2013 · Mai Bui, Indra Gunawan, et al. · Computers & Chemical Engineering · 154

Opportunities and challenges for process control in process intensification

2011 · Nikola M. Nikačević, Adrie E.M. Huesman, et al. · Chemical Engineering and Processing - Process Intensification · 149

An Approach for Factory-Wide Control Utilizing Virtual Metrology

2007 · Aftab A. Khan, James R. Moyne, et al. · IEEE Transactions on Semiconductor Manufacturing · 144

Virtual metrology and feedback control for semiconductor manufacturing processes using recursive partial least squares

2008 · Aftab A. Khan, J.R. Moyne, et al. · Journal of Process Control · 143

Predictive control of a gas–liquid separation plant based on a Gaussian process model

2006 · Bojan Likar, Juš Kocijan · Computers & Chemical Engineering · 133

Optical wafer metrology sensors for process-robust CD and overlay control in semiconductor device manufacturing

2016 · Arie J den Boef · Surface Topography Metrology and Properties · 131

An engineering study on the enhanced control and operation of continuous manufacturing of pharmaceutical tablets via roller compaction

2012 · Ravendra Singh, Marianthi Ierapetritou, et al. · International Journal of Pharmaceutics · 124

Process analytical technologies and real time process control a review of some spectroscopic issues and challenges

2011 · Zengping Chen, David Lovett, et al. · Journal of Process Control · 115

Process control system for VLSI fabrication

1991 · E. Sachs, R.-S. Guo, et al. · IEEE Transactions on Semiconductor Manufacturing · 114

Works count: 2,353

Citation count: 17,780