1995 · Junzo Ishikawa, Hiroshi Tsuji, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 100
1993 · J.F.D. Chubaci, T. Sakai, et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 61
1994 · S. Hiyamizu, S. Shimomura, et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 56