Work

Design of SiGe Nano-Electromechanical relays for logic applications

Year: 2013

Type: conference-paper

Source: International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

DOI: 10.1109/eurosime.2013.6529971

Authors: V. Rochus, M. Ramezani, S. Cosemans, S. Severi, A. Witvrouw, K. De Meyer, H. A. C. Tilmans, X. Rottenberg

Institutions: IMEC, KU Leuven

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2000273353

FWCI: 0.407

Cites: 13

Cited by: 4

Related to: 10