Work

Quantitation of latent resist images using photon tunneling microscopy

Year: 1998

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.590384

Authors: J. A. Liddle, J. A. Johnson, R. Cirelli, M. M. Mkrtchyan, A. E. Novembre, M. L. Peabody

Institution: University of California, Santa Barbara

Language: English

Topic: Near-Field Optical Microscopy

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W2161657303

FWCI: 0.735

Cites: 6

Cited by: 4

Related to: 10