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Author

Manfred Maul

Observed names: M Maul, M. Maul
OpenAlex ID: A5010767289
Triangulation With Expanded Range Of Depth
1985 · G. Bickel, G. Hausler, et al. · Optical Engineering · 125
Experimental result and simulation analysis for the use of pixelated illumination from source mask optimization for 22nm logic lithography process
2009 · Kafai Lai, Alan E. Rosenbluth, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 47
Generation of arbitrary freeform source shapes using advanced illumination systems in high-NA immersion scanners
2010 · Jörg Zimmermann, Paul Gräupner, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 28
Optimizing and enhancing optical systems to meet the low k 1 challenge
2003 · Donis G. Flagello, Robert J. Socha, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 24
Range sensing based on shearing interferometry
1988 · Gerd Häusler, J. Hutfless, et al. · Applied Optics · 23
Triangulation With Large Dynamical Range
1986 · W Dremel, G Hausler, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 20
Speckle in optical lithography and its influence on linewidth roughness
2009 · Oscar Noordman, Andrey Tychkov, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 19
Telecentric Scanner For 3-D Sensing
1985 · G. Hausler, M. Maul · Optical Engineering · 14
Speckle in optical lithography and the influence on line width roughness
2009 · Oscar Noordman, Andrey Tychkov, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 8
Triangulation With Expanded Range Of Depth
1986 · G Hausler, M Maul · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 3
Triangulation with expanded range of depth
1985 · G. Häusler, M. Maul · Annual Meeting Optical Society of America · 2
Three-Dimensional Inspection of Large Objects
1987 · G. Bickel, G. Häusler, et al. · Springer eBooks
Works count: 12
Citation count: 313
H-index: 8
I10-index: 8
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