Optimizing and enhancing optical systems to meet the low k 1 challenge
Year: 2003
Type: conference-paper
DOI: 10.1117/12.485340
Authors: Donis G. Flagello, Robert J. Socha, Xuelong Shi, Jan B. van Schoot, Jan Baselmans, Mark A. van de Kerkhof, Wim de Boeij, Andre Engelen, Rene Carpaij, Oscar Noordman, Marco H. P. Moers, Melchior Mulder, Jo Finders, Henk van Greevenbroek, Martin Schriever, Manfred Maul, Helmut Haidner, Markus Goeppert, Ulrich Wegmann, Paul Graeupner
Institutions: ASML (United States), ASML (Netherlands), Carl Zeiss (Germany)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1997131777