Product
Help
Pricing
About
Jobs
Log in
Get started
Author
Add to collection
De-Dui Liao
Observed name:
D. M. Liao
Institution:
Applied Materials (United States)
Observed institutions:
The University of Texas at Arlington,
Applied Materials (United States)
OpenAlex ID:
A5015370992
Distinguishing between EL2 and dislocation formation mechanisms in GaAs by mapping topographies
1990
·
Faa-Ching Wang
, Mann-Fu Rau
, et al.
·
Journal of Crystal Growth
·
3
As-deposited properties and rapid thermal annealing effects on Ti/TiN barrier layer for aluminum plug technology
1994
·
De-Dui Liao
, Yih-Shung Lin
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
2
Improved aluminum plug process for submicron via filling
1994
·
Hong Yang
, Yih-Shung Lin
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
·
1
Surface-contamination-related thermal instability in GaAs
1990
·
Faa-Ching Wang
, Mann-Fu Rau
, et al.
·
Journal of Applied Physics
·
1
Optimization of PVD Ti/CVD TiN Liner for 0.35 μm Tungsten Plug Technology
1996
·
C.-K. Wang
, L. M. Liu
, et al.
·
MRS Proceedings
Improvement of metal step coverage of VLSI device structures in a manufacturing environment
1993
·
Rob B. MacNaughton
, T. H. Wonacott
, et al.
·
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Show more works
View as search
Works count:
6
Citation count:
7
H-index:
2
I10-index:
Year
Topic
Type
