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2011 · Jason K. Kawasaki, Rainer Timm, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 8
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2011 · Trevor E. Buehl, Christopher J. Palmstrøm, et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 4