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Koichi Hontake

Observed name: Koichi HONTAKE
OpenAlex ID: A5031294436
EUV patterning successes and frontiers
2016 · Nelson Felix, Dan Corliss, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 28
Defect detection strategies and process partitioning for single-expose EUV patterning
2018 · Luciana Meli, Karen Petrillo, et al. · Journal of Micro/Nanopatterning Materials and Metrology · 13
Driving down defect density in composite EUV patterning film stacks
2017 · Luciana Meli, Karen Petrillo, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 13
Preparation and Surface Activities of Cotelomers of Acrylic Acid and n-Octyl, 2-Ethylhexyl or 2-Phenylethyl Acrylate.
2001 · Tomokazu YOSHIMURA, Koichi HONTAKE, et al. · Journal of Oleo Science · 5
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Coater/developer based techniques to improve high-resolution EUV patterning defectivity
2017 · Eric Liu, Akiteru Ko, et al. · International Conference on Extreme Ultraviolet Lithography · 4
Defect detection strategies and process partitioning for SE EUV patterning (Conference Presentation)
2018 · Shinichiro Kawakami, Luciana Meli, et al. · Extreme Ultraviolet (EUV) Lithography · 3
Copper Plating Method on Flat Surface for High Frequency Signal Transfer
2005 · Koichi Hontake, Yasuhiro Wakizaka, et al. · Japanese Journal of Applied Physics · 3
CD uniformity improvement for sub 20 nm DRAM process with negative tone development
2020 · Yu-Chen Lin, Mifong Wu, et al. · Advances in Patterning Materials and Processes
Metal containing material processing on coater/developer system
2016 · Shinichiro Kawakami, Hiroshi Mizunoura, et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
Works count: 9
Citation count: 69
H-index: 4
I10-index: 3
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